GSL1700XF3LVseriesmian

1700°C Single Zone Alumina Tube Furnace with 3 Channel Gas Mixer, Vacuum Station, and Anti-Corrosive Vacuum Gauge – GSL-1700X-F3LV series

GSL-1700X-F3LV series tube furnace is a CE certified  alumina tube furnace with mechanical vacuum pump and three channels gas flowing system, which can heat sample to 1700°C and achieve vacuum degree up to 5×10-2 torr and mix 1- 3  type of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.

Product Description

SPECIFICATIONS

Tube Furnace Structure
  • Double layer steel casing with air cooling. Two cooling fan inside to keep temperature of outside case < 55°C.
  • High purity fibrous alumina insulation for Max, energy saving.
Power Consumption 5kW Max.
Input Voltage AC 208~240V, Single Phase, 50/60Hz
Max. Heating Temp. 1700°C
Max. Heating Rate 5°C/min
Max. Cooling Rate 5°C/min
Heating Zone Length 455mm (18″)
Constant Temp. Zone 150(+/-1C)
Temperature Accuracy +/-1°C
Temperature Controller
  • PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
  • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Please click here to learn why SCR is more accurate than SSC (Solid state relay).
  • Built in PID Auto-Tune function with overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
  • Optional:
    • The furnace may be operated by PC by installing three control modules. Please order the MTS-02 control modules at extra cost.
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.

 

Heating Elements 1800 grade MoSi2   ( 8 pcs )
TubeMaterials and Size
  • 99.8% high purity Al2O3 ceramic tube
  • ID: 72mm x  OD: 80 mm   x 1000 mm length.
Digital Vacuum Gauge
  • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases.
  • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
  • Optional:   click  the pic-below- right to order Constant temperature control module.
Vacuum Sealing
  • Two stainless steel flanges with digital vacuum gauge and valves is included.
  • Vacuum pressure can reach 5×10-2 torr via mechanical pump.
  • The leaking rate is 6 mtorr/min in max. and 2 in stable, click the picture. below to get details chart and data measured by CE certificated digital vacuum meter:

(For a whole 24 hours curve display, the time segment through 08:00:00~21:10:00 in X axis is passed over in the chart, therefore, steep variety in there)

Vacuum Pump and fittings Vacuum Pump
  • Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed inside the vacuum station. vacuum pressure can reach up to 10^-2 Torr.
  • The max. vacuum pressure in the alumina tube furnace is 5×10^-2 torr by using this vacuum mechanical pump.

Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr.

Fittings The standard vacuum fittings include:

  • A pair of stainless steel vacuum flange with KF-25 pump connector, two needle valves and one 1/4″ swagelok tube connector.
  • A 1000mm long KF-25 stainless steel vacuum bellows
  • Four KF-25 quick clamps
Gas Flow Meter
  • Three gas flow-meters ( 4% accuracy FS) are installed inside mobile case provide monitor to gas flowing rates.
    • 1) Compact direct read flow meter, 10-100 cc/min.
    • 2) Compact direct read flow meter, 16-160 cc/min.
    • 3) Compact direct read flow meter, 25-250 cc/min.
  • One pressure meter is installed inside mobile cart for monitoring the pressure of the mixed gas.
  • Four stainless steel needle valve are installed in the front panel to control the gas route independently.
Front Panel Back Panel Gas Routes
Oxygen Monitoring An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
Shipping Info Product Dimensions
  • 80 & 100mm O.D Tube Furnace:    550 x 500 x 700mm L x W x H
  • Gas Mix Station: 600 x 600 x 700mm
  • Vacuum station: 600 x 600 x 700mm
New weight 450 lb (in total)
Shipping Dimensions Two cases in one pallet: 45 x 45 x 35″/ea. case
Shipping Weight 500 lb (in total)
Warranty One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements
are not covered by the warranty, please order the replacement at related products below.)
Compliance
  • CE Certified
  • UL / MET / CSA Certification is available upon request, additional charges will apply
  • Temperature controller is MET and CE Certified
  • Transformer is UL Certified
Application Notes

Click here to learn more about the installation of a gas regulator.

  • Please click here to see our typical temperature profile calibration result at various temperature.
  • From 7/15/08, MTI calibrate each each furnace by NIST certificated Omega CL3515R precision Temperature calibrator, and pre-set temperature off (SC value) in controller before shipping.
  • In order to obtain accurate temperature inside tube furnace, you need to calibrate temperature by yourselves. Please click here to learn how.
  • How to set up ceramic tube and vacuum flange for MTI Tube furnace.
  • The tube furnaces with alumina tube are designed for using under vacuum and low pressure < 0.02 MPa / 0.2 Bar/ 3 PSI
  • Attention: A two stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Never heat the furnace while the gas release valve is closed and a positive pressure condition exists within the furnace chamber. The pressure gauge must be used to closely monitor the chamber condition at all times during the heating process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSI to prevent unforseeable damages.
  • The flow rate for gases should be limited to < 200 SCCM ( or 200ml/min )
  • Vacuum limit definition for all alumina tube furnaces: * Vacuum pressures may only be safely used up to 1500°C
Operation Instructions