» Box type Physical Vapor Deposition systems, based on prismatic/cylindrical vacuum chambers. These systems have 2 thermal and/or 1-4 DC-RF sputter sources photon enabling the user to do full co-evaporation. Multi-layered thin films of different materials can be prepared by photon systems.

» Combined Systems can be tailored to fit user desires in order to produce multilay- ered, nanosize metallic, oxide, carbide or nitride films, such as Si, Al, Ti, SiO,